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The increased concern for environment and sustainability are pushing machining operations towards the reduction or even complete elimination of cutting fluids. Grinding is not excluded from this objective, but greater difficulties appear ...
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Dry etching and planarization CMP applications, for surface micromachining 273–293 application for micromachining 289–292 characteristics 274–275 dry etching 278–280 electron beam exposure 278–280 influence of 277–288 ...
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